JPH057820B2 - - Google Patents

Info

Publication number
JPH057820B2
JPH057820B2 JP58238098A JP23809883A JPH057820B2 JP H057820 B2 JPH057820 B2 JP H057820B2 JP 58238098 A JP58238098 A JP 58238098A JP 23809883 A JP23809883 A JP 23809883A JP H057820 B2 JPH057820 B2 JP H057820B2
Authority
JP
Japan
Prior art keywords
secondary electrons
objective lens
sample
electron
magnetic pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58238098A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60130044A (ja
Inventor
Junichi Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58238098A priority Critical patent/JPS60130044A/ja
Publication of JPS60130044A publication Critical patent/JPS60130044A/ja
Publication of JPH057820B2 publication Critical patent/JPH057820B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58238098A 1983-12-16 1983-12-16 走査電子顕微鏡 Granted JPS60130044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58238098A JPS60130044A (ja) 1983-12-16 1983-12-16 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58238098A JPS60130044A (ja) 1983-12-16 1983-12-16 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS60130044A JPS60130044A (ja) 1985-07-11
JPH057820B2 true JPH057820B2 (en]) 1993-01-29

Family

ID=17025138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58238098A Granted JPS60130044A (ja) 1983-12-16 1983-12-16 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS60130044A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3638682A1 (de) * 1986-11-13 1988-05-19 Siemens Ag Spektrometerobjektiv fuer korpuskularstrahlmesstechnik
DE3750659T2 (de) * 1986-11-28 1995-02-16 Nippon Telegraph & Telephone Beobachtungsvorrichtung, die geladene teilchenstrahlen verwendet und eine solhe vorrichtung verwendendes oberflächenbeobachtungsverfahren.
JP2010055756A (ja) 2008-08-26 2010-03-11 Hitachi High-Technologies Corp 荷電粒子線の照射方法及び荷電粒子線装置
JP5478683B2 (ja) * 2012-08-27 2014-04-23 株式会社日立ハイテクノロジーズ 荷電粒子線の照射方法及び荷電粒子線装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52162853U (en]) * 1976-06-04 1977-12-09

Also Published As

Publication number Publication date
JPS60130044A (ja) 1985-07-11

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